Communications in Theoretical Physics
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DING Wen-Ge, YUAN Jing, MENG Ling-Hai, WU Shu-Jie, YU Wei, and FU Guang-Sheng
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Abstract: The amorphous silicon nanoparticles (Si NPs) embedded in silicon nitride (SiNx) films prepared by helicon wave plasma-enhanced chemical vapor deposition (HWP-CVD) technique are studied. From Raman scattering investigation, we determine that the deposited film has the structure of silicon nanocrystals embedded in silicon nitride (nc-Si/SiNx) thin film at a certain hydrogen dilution amount. The analysis of optical absorption spectra implies that the Si NPs is affected by quantum size effects and has the nature of an indirect-band-gap semiconductor. Further, considering the effects of the mean Si NP size and their dispersion on oscillator strength, and quantum-confinement, we obtain an analytical expression for the spectral absorbance of ensemble samples. Gaussian as well as lognormal size-distributions of the Si NPs are considered for optical absorption coefficient calculations. The influence of the particlesize-distribution on the optical absorption spectra was systematically studied. We present the fitting of the optical absorption experimental data with our model and discuss the results.
Key words: optical absorption, silicon nanoparticles, quantum size effects, oscillator strength, silicon nitride film
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DING Wen-Ge, YUAN Jing, MENG Ling-Hai, WU Shu-Jie, YU Wei, and FU Guang-Sheng, Commun. Theor. Phys. 55 (2011) 688.
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https://ctp.itp.ac.cn/EN/Y2011/V55/I04/688
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