Absorption Enhancement of Ultrathin Crystalline Silicon Solar Cells with Dielectric Si3N4 Nanostructures *

Xin-Yu Tan,Lei Sun,Guo-Rong Zhang,Can Deng,Yi-Teng Tu,Li Guan

Fig. 1 (Color online) (a) 3D diagram of structure with 67 nm flat Si$_{3}$N$_{4}$ used as a control group for optimization of texture parameter using simulation. (b) 3D diagram of structure with Si$_{3}$N$_{4}$ CTCs arrays used for optimization of texture parameter using simulation. (c) 3D diagram of structure with Si$_{3}$N$_{4}$ CTCs arrays and back silver reflector used for optimization of texture parameter using simulation. (d) Schematic of the FDTD simulation model in Fig. 1(b). PML perfectly matched layer, PBC periodic boundary condition.